Background to scanning electron microscopy (SEM). Electron-specimen interaction: models for elastic and inelastic interaction, Monte-Carlo simulation for electron-specimen interaction. Properties of main signals and X-ray microanalysis. Electron optics: electron sources, magnetic lenses and aberrations. Principles of image formation. Various SEM types including ESEM and advanced methods. Practical SEM aspects and various applications.

Note: the SEM laboratory course follows the SEM course and takes place at the third part of the semester.