Credit points: 3.5
Prerequisites: Introduction to Semiconductor Physics.
Principles in micro-electro-mechanical system (MEMS) manufacturing: materials in MEMS (silicon, glass, plastic, PDMS), lithography methods (optical, e-beam,, soft-lithography), evaporation and etching methods (dry, wet), 3D fabrication, surface modification methods. Sensing and actuation principles in MEMS; mechanical (piezo-resistors, piezo-resistors) acoustic, thermal and chemical transducers. MEMS sensors and actuators for acceleration, pressure, optical and biological application including micro channels, pumps and valves.