2014 - 2015

0512-4702-01
  Introduction to Micro-Electro-Mechanical Systems  
FACULTY OF ENGINEERING | ELECTRICAL ENGINEERING AND ELECTRONIC
Lilah Inzelberg Sem  2
Prof. Yael Hanein Tue1100-1300 Sem  2
Wed1800-2000 Sem  2
 
 
University credit hours:  4.0

Course description
Credit points: 3.5
Prerequisites: Introduction to Semiconductor Physics.
Principles in micro-electro-mechanical system (MEMS) manufacturing: materials in MEMS (silicon, glass, plastic, PDMS), lithography methods (optical, e-beam,, soft-lithography), evaporation and etching methods (dry, wet), 3D fabrication, surface modification methods. Sensing and actuation principles in MEMS; mechanical (piezo-resistors, piezo-resistors) acoustic, thermal and chemical transducers. MEMS sensors and actuators for acceleration, pressure, optical and biological application including micro channels, pumps and valves. 

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