Credit points: 3.4

Pre-requisites. Solid Mechanics I and II, Dynamics of Rigid Body and Physics II.

 Main applications of Microsystems technologies (MST). Overview of fabrication processes. Main structural materials used in microscale. Detailed design principles. Mask design and layout. Overview of actuation and sensing principles. Case studies-electrostatic actuator, electrostatic inertial sensor, thermal actuator, magnetic actuator, microresonators, optical devices and micromirrors. Overview of characterization methods. Project-design of micro actuator or sensor.