 2015 - 2016 | |||||||||||||||||||||||||||||
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| 0540-6606-01 | Design & Modeling of Micro Electro Mechanical Systems (Mems) | ||||||||||||||||||||||||||||
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| FACULTY OF ENGINEERING | |||||||||||||||||||||||||||||
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University credit hours: 3.0
Course description
Credit Points: 3
Pre-requisites: Introduction to Elasticity-0542.4221; Solid Mechanics (1)-0542.2200; Solid Mechanics (2)-0542.2300.
Introduction to MEMS. Review of main applications of MEMS. Review of main fabrication approaches, main stages of MEMS design. Sensing and actuation methods. Principles of modeling of microdevices, levels of modeling, physical level and system level modeling. Mechanical properties of materials used in micro-devices. Forces acting in micro-devices, introduction to scaling theory. Electrostatic actuation. Mathematical formulation of a coupled electro-mechanical problem, solution of typical problems of electrostatically actuated devices. Stability analysis of electrostatically actuated device, dynamics of electrostatic MEMS. Damping mechanisms in MEMS, squeeze film analysis. Simplified approaches for evaluation of electrostatic forces. Utilization of the solution of the field problem for parameters extraction and construction of macro-models for system level analysis. Numerical methods for the analysis of MEMS with electrostatic actuation, use of commercially available tools for MEMS design.
Pre-requisites: Introduction to Elasticity-0542.4221; Solid Mechanics (1)-0542.2200; Solid Mechanics (2)-0542.2300.
Introduction to MEMS. Review of main applications of MEMS. Review of main fabrication approaches, main stages of MEMS design. Sensing and actuation methods. Principles of modeling of microdevices, levels of modeling, physical level and system level modeling. Mechanical properties of materials used in micro-devices. Forces acting in micro-devices, introduction to scaling theory. Electrostatic actuation. Mathematical formulation of a coupled electro-mechanical problem, solution of typical problems of electrostatically actuated devices. Stability analysis of electrostatically actuated device, dynamics of electrostatic MEMS. Damping mechanisms in MEMS, squeeze film analysis. Simplified approaches for evaluation of electrostatic forces. Utilization of the solution of the field problem for parameters extraction and construction of macro-models for system level analysis. Numerical methods for the analysis of MEMS with electrostatic actuation, use of commercially available tools for MEMS design.